Supplementary document for Efficient thermo-optic micro-ring phase shifter made of PECVD silicon-rich amorphous silicon carbide - 6263046.pdf
| Autor: | Chang, Li-Yang, Pappert, Steve, Yu, Paul |
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| Rok vydání: | 2023 |
| DOI: | 10.6084/m9.figshare.21967766 |
| Popis: | Supplementary material |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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