Investigations of the thermal reactions of chlorine on the GaAs(100) surface
| Autor: | J S Foord, W S Balch, C L French |
|---|---|
| Rok vydání: | 1991 |
| Předmět: |
Thermal desorption spectroscopy
Inorganic chemistry Analytical chemistry Thermal desorption chemistry.chemical_element Condensed Matter Physics Corrosion Gallium arsenide chemistry.chemical_compound chemistry X-ray photoelectron spectroscopy Etching (microfabrication) Phase (matter) Chlorine General Materials Science |
| Zdroj: | Journal of Physics: Condensed Matter. 3:S351-S355 |
| ISSN: | 1361-648X 0953-8984 |
| Popis: | The thermal reactions of Cl2 with the GaAs(100) surface were studied using XPS, LEED and thermal desorption spectroscopy. Chlorine uptake at 175 K is initially very rapid, but an extensive corrosion phase is not formed. Five thermal desorption features are seen, with cracking patterns corresponding to GaCl, As2, GaCl3, Cl2 and AsCl3. The implications for the thermal etching of gallium arsenide are discussed. |
| Databáze: | OpenAIRE |
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