Optimizing an electrochemical deposition process by use of design of computer experiments

Autor: J.-P. Caire, B. Nguyen, F. Gerard, D. Rabiot, Eric Chainet
Přispěvatelé: Laboratoire d'Electrochimie et de Physico-chimie des Matériaux et des Interfaces (LEPMI ), Institut de Chimie du CNRS (INC)-Institut National Polytechnique de Grenoble (INPG)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Université Joseph Fourier - Grenoble 1 (UJF)-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS), Alcatel Alsthom Recherche, ALCATEL
Rok vydání: 1998
Předmět:
Zdroj: Analusis
Analusis, EDP Sciences, 1998, 26 (8), pp.281-283. ⟨10.1051/analusis:1998172⟩
ISSN: 1286-482X
0365-4877
DOI: 10.1051/analusis:1998172
Popis: International audience; A response surface methodology only based in this case on computer experiments was used in conjunction with the desirability concept to optimize a priori an electrodeposition process designed for production of gold-tin alloy bumps on a 4 inches wafer. The efficiency of the method was used to achieve at a cheap cost with a small number of computer experiments the technical specifications required in term of metal deposit thickness uniformity.
Databáze: OpenAIRE
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