Formation of oriented nanostructures in diamond using metallic nanoparticles
| Autor: | Hasan-al Mehedi, Etienne Gheeraert, Franck Omnès, David Eon, Sébastien Ruffinatto, Clément Hébert |
|---|---|
| Přispěvatelé: | Semi-conducteurs à large bande interdite (SC2G), Institut Néel (NEEL), Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2012 |
| Předmět: |
Materials science
Nanostructure Annealing (metallurgy) Material properties of diamond Nanoparticle Bioengineering Nanotechnology 02 engineering and technology engineering.material 010402 general chemistry 01 natural sciences General Materials Science Electrical and Electronic Engineering ComputingMilieux_MISCELLANEOUS Mechanical Engineering Diamond General Chemistry 021001 nanoscience & nanotechnology Microstructure Nanocrystalline material 0104 chemical sciences Membrane Mechanics of Materials engineering [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] 0210 nano-technology |
| Zdroj: | Nanotechnology Nanotechnology, Institute of Physics, 2012, 23 (45), pp.455302. ⟨10.1088/0957-4484/23/45/455302⟩ |
| ISSN: | 0957-4484 1361-6528 |
| DOI: | 10.1088/0957-4484/23/45/455302⟩ |
| Popis: | A simple, fast and cost-effective etching technique to create oriented nanostructures such as pyramidal and cylindrical shaped nanopores in diamond membranes by self-assembled metallic nanoparticles is proposed. In this process, a diamond film is annealed with thin metallic layers in a hydrogen atmosphere. Carbon from the diamond surface is dissolved into nanoparticles generated from the metal film, then evacuated in the form of hydrocarbons and, consequently, the nanoparticles enter the crystal volume. In order to understand and optimize the etching process, the role of different parameters such as type of catalyst (Ni, Co, Pt, and Au), hydrogen gas, temperature and time of annealing, and microstructure of diamond (polycrystalline and nanocrystalline) were investigated. With this technique, nanopores with lateral sizes in the range of 10-100 nm, and as deep as about 600 nm, in diamond membranes were produced without any need for a lithography process, which opens the opportunities for fabricating porous diamond membranes for chemical sensing applications. |
| Databáze: | OpenAIRE |
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