Diagnostics of microwave assisted electron cyclotron resonance plasma source for surface modification of nylon 6
| Autor: | Sudha V. Bhoraskar, S. N. Sahasrabudhe, Supriya E. More, Avinash S. Bansode, G. D. Dhamale, S. Ghorui, Vikas L. Mathe, Partha Sarathi Das |
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| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Materials science Plasma parameters 02 engineering and technology Plasma 021001 nanoscience & nanotechnology Threshold energy 01 natural sciences Electron cyclotron resonance symbols.namesake 0103 physical sciences symbols Electron temperature Langmuir probe Surface modification Atomic physics 0210 nano-technology Instrumentation Plasma processing |
| Zdroj: | The Review of scientific instruments. 89(1) |
| ISSN: | 1089-7623 |
| Popis: | Looking at the increasing scope of plasma processing of materials surface, here we present the development and diagnostics of a microwave assisted Electron Cyclotron Resonance (ECR) plasma system suitable for surface modification of polymers. Prior to the surface-treatment, a detailed diagnostic mapping of the plasma parameters throughout the reactor chamber was carried out by using single and double Langmuir probe measurements in Ar plasma. Conventional analysis of I-V curves as well as the elucidation form of the Electron Energy Distribution Function (EEDF) has become the source of calibration of plasma parameters in the reaction chamber. The high energy tail in the EEDF of electron temperature is seen to extend beyond 60 eV, at much larger distances from the ECR zone. This proves the suitability of the rector for plasma processing, since the electron energy is much beyond the threshold energy of bond breaking in most of the polymers. Nylon 6 is used as a representative candidate for surface processing in the presence of Ar, H |
| Databáze: | OpenAIRE |
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