5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability

Autor:	Remco J. Wiegerink, Arthur C. de Oliveira, Jarno Groenesteijn, Kofi A. A. Makinwa
Přispěvatelé:	MESA+ Institute, Integrated Devices and Systems
Jazyk:	angličtina
Rok vydání:	2021
Předmět:	Microelectromechanical systems Materials science Flow (mathematics) Mass flow sensor Mass flow 010401 analytical chemistry Microfluidics Calibration 01 natural sciences Measure (mathematics) 0104 chemical sciences Volumetric flow rate Computational physics
Zdroj:	ISSCC 2021 IEEE International Solid-State Circuits Conference, ISSCC 2021-Digest of Technical Papers 2021 IEEE International Solid-State Circuits Conference, ISSCC 2021-Digest of Technical Papers, 84-86 STARTPAGE=84;ENDPAGE=86;TITLE=2021 IEEE International Solid-State Circuits Conference, ISSCC 2021-Digest of Technical Papers
ISSN:	0193-6530
Popis:	Precision flow sensors are widely used in the pharmaceutical, food, and semiconductor industries to measure small amounts (
Databáze:	OpenAIRE
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