A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders
| Autor: | Rafal Kielbik, Piotr Amrozik, M. Napieralska, Cezary Maj, Piotr Zając, Bartosz Sakowicz, Jacek Nazdrowicz, Michal Szermer, Grzegorz Jablonski, Mariusz Jankowski |
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| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
Medical staff
Computer science Capacitive sensing Movement Acceleration TP1-1185 02 engineering and technology Accelerometer 01 natural sciences Biochemistry Article Analytical Chemistry MEMS accelerometer Accelerometry Electronic engineering Miniaturization Humans Sensitivity (control systems) Electrical and Electronic Engineering Instrumentation Monitoring Physiologic Microelectromechanical systems portable system Chemical technology 010401 analytical chemistry Linearity Micro-Electrical-Mechanical Systems 021001 nanoscience & nanotechnology Atomic and Molecular Physics and Optics 0104 chemical sciences imbalance disorders 0210 nano-technology ASIC readout circuit |
| Zdroj: | Sensors Volume 21 Issue 10 Sensors (Basel, Switzerland) Sensors, Vol 21, Iss 3564, p 3564 (2021) |
| ISSN: | 1424-8220 |
| DOI: | 10.3390/s21103564 |
| Popis: | The constant development and miniaturization of MEMS sensors invariably provides new possibilities for their use in health-related and medical applications. The application of MEMS devices in posturographic systems allows faster diagnosis and significantly facilitates the work of medical staff. MEMS accelerometers constitute a vital part of such systems, particularly those intended for monitoring patients with imbalance disorders. The correct design of such sensors is crucial for gathering data about patient movement and ensuring the good overall performance of the entire system. This paper presents the design and measurements of a three-axis accelerometer dedicated for use in a device which tracks patient movement. Its main focus is the characterization of the sensor, comparing different designs and evaluating the impact of the packaging and readout circuit integration on sensor operation. Extensive testing and measurements confirm that the designed accelerometer works correctly and allows identifying the best design in terms of sensitivity/stability. Moreover, the response of the proposed sensor as a function of the applied acceleration demonstrates very good linearity only if the readout circuit is integrated in the same package as the MEMS sensor. |
| Databáze: | OpenAIRE |
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