Dynamic smoothening and tribological properties of pulsed-DC sputtered DLC based nanocomposite films
Autor: | Shaha, K. P., Pei, Y. T., Chen, C. Q., De Hosson, J. Th. M., DeHosson, JTM, Brebbia, CA |
---|---|
Jazyk: | angličtina |
Rok vydání: | 2009 |
Předmět: |
Surface diffusion
pulsed-DC sputtering COATINGS Toughness Materials science Nanocomposite nanocomposite Scanning electron microscope dynamic roughening SURFACES Pulsed DC Nanotechnology Surface finish Sputter deposition rough substrates EVOLUTION CARBON Sputtering smoothening GROWTH Composite material |
Zdroj: | SURFACE EFFECTS AND CONTACT MECHANICS IX, 3-11 STARTPAGE=3;ENDPAGE=11;TITLE=SURFACE EFFECTS AND CONTACT MECHANICS IX |
DOI: | 10.2495/SECM090011 |
Popis: | Interface roughness and dynamic growth behavior of TiC/a-C nanocomposite films deposited by pulsed-DC magnetron sputtering were studied using atomic force microscopy and scanning electron microscopy. Upon increasing the intensity of concurrent ion impingement by raising the frequency of pulsed-DC sputtering, a transition from dynamic roughening to dynamic smoothening is revealed in the growth behavior of TiC/a-C nanocomposite films. Analyses of surface morphology and growth conditions imply that there is a transition of dominating growth mechanism from geometric shadowing to surface diffusion driven by impact-induced atomistic downhill flow process due to enhanced impingement of Ar+ ions, which occurs upon the change of pulse frequency from 100 kHz to 350 kHz. Also ultra-smooth TiC/a-C:H films were successfully grown on initial rough steel substrates (Sa similar to 6 nm) by pulsed-DC sputtering at 200 and 350 kHz frequency. These nanocomposite films exhibit superb toughness, vicar resistance and ultralow friction. |
Databáze: | OpenAIRE |
Externí odkaz: |