Formation of nanoripples on ZnO flat substrates and nanorods by gas cluster ion bombardment

Autor: Chuansheng Liu, Dejun Fu, Xiaomei Zeng, Bin Xing, Xiangheng Xiao, Rakhim Rakhimov, Alexander Tolstogouzov, Wenbin Zuo, Vasiliy O. Pelenovich
Přispěvatelé: DF – Departamento de Física, CeFITec – Centro de Física e Investigação Tecnológica
Jazyk: angličtina
Rok vydání: 2020
Předmět:
Zdroj: Beilstein Journal of Nanotechnology, Vol 11, Iss 1, Pp 383-390 (2020)
Beilstein Journal of Nanotechnology
Repositório Científico de Acesso Aberto de Portugal
Repositório Científico de Acesso Aberto de Portugal (RCAAP)
instacron:RCAAP
ISSN: 2190-4286
Popis: Funding Information: This work was supported by the National Natural Science Foundation of China under grant 11875210, the Science and Technology Planning Project of Guangdong Province under grant 2018A050506082, China Postdoctoral Science Foundation under grant 2019M652687, and by the grant RFBR No.19-05-00554 in the part of the development of advanced approach to analysis of geochemical objects. In the present study Ar+ cluster ions accelerated by voltages in the range of 5-10 kV are used to irradiate single crystal ZnO substrates and nanorods to fabricate self-assembled surface nanoripple arrays. The ripple formation is observed when the incidence angle of the cluster beam is in the range of 30-70°. The influence of incidence angle, accelerating voltage, and fluence on the ripple formation is studied. Wavelength and height of the nanoripples increase with increasing accelerating voltage and fluence for both targets. The nanoripples formed on the flat substrates remind of aeolian sand ripples. The ripples formed at high ion fluences on the nanorod facets resemble well-ordered parallel steps or ribs. The more ordered ripple formation on nanorods can be associated with the confinement of the nanorod facets in comparison with the quasi-infinite surface of the flat substrates. publishersversion published
Databáze: OpenAIRE