Positioning sensor with nanometric performances over centimetric range for nanotechnology sample-holders
| Autor: | Barthelemy Cagneau, S. Topcu, Yasser Alayli, Luc Chassagne, Alexia Missoffe, P. Ruaux |
|---|---|
| Přispěvatelé: | Laboratoire d'Ingénierie des Systèmes de Versailles (LISV), Université de Versailles Saint-Quentin-en-Yvelines (UVSQ) |
| Rok vydání: | 2012 |
| Předmět: |
Computer science
nanodisplacement System of measurement Physics::Optics Nanotechnology 02 engineering and technology 021001 nanoscience & nanotechnology Translation (geometry) 01 natural sciences Metrology 010309 optics [SPI]Engineering Sciences [physics] Interferometry —high resolution sensor low noise electronic Nanosensor Simplicity (photography) 0103 physical sciences Range (statistics) Sensitivity (control systems) [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics 0210 nano-technology |
| Zdroj: | Optomechatronic Technologies (ISOT), 2012 International Symposium on International Symposium on Optomechatronic Technologies (ISOT), 2012 International Symposium on Optomechatronic Technologies (ISOT), 2012, 2012, Paris, France. pp.1-2, ⟨10.1109/ISOT.2012.6403245⟩ |
| DOI: | 10.1109/isot.2012.6403245 |
| Popis: | International audience; —We developed a very simple optical sensor for centimeter range measurements with nanometric resolution, planed to be used for sample-holding in nanotechnology. In this work, the principle is detailed and experimental results are pointed out. The compact system is composed of a laser-diode module and a photodiode array leading to a non-contact sensor. With a corner cube configuration, it is not sensitive to most of main mechanical defects of the mobile platform. The use of an optical fiber and a normalization process inspired from classical four-quadrant detectors allows high repeatability and minimal drifts. Nanometric resolution is achieved experimentally over centimeters range. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|