Mid-IR emission from integrated rare earth (Dy3+, Pr3+)-doped chalcogenides waveguides for sensing applications

Autor: Loic Bodiou, Marion Baillieul, Virginie Nazabal, Jonathan Lemaitre, Albane Benardais, Sofiane Meziani, Nathalie Lorrain, Yannick Dumeige, Petr Nemec, Joël Charrier
Přispěvatelé: Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), University of Pardubice, Institut des Sciences Chimiques de Rennes (ISCR), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Ecole Nationale Supérieure de Chimie de Rennes (ENSCR)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), CNRS through the MITI interdisciplinary programs (ORIGAMI), French national research agency under MID-VOC ANR project [ANR-17-CE09-0028-01], CPER SOPHIE, French Renatech+ Network, Lannion Tregor Communaute, Region Bretagne (grant DESIR), Baets, RG, O'Brien, Vivien, ANR-17-CE09-0028,MID-VOC,Circuit optique intégré à base matériaux poreux pour la détection de composés organiques volatiles dans le moyen infrarouge(2017)
Rok vydání: 2022
Předmět:
Zdroj: Proc. SPIE
SPIE Photonics Europe 2022
SPIE Photonics Europe 2022, Apr 2022, Strasbourg, France. pp.1214802, ⟨10.1117/12.2621815⟩
DOI: 10.1117/12.2621815
Popis: International audience; The mid-infrared (mid-IR) spectral region is of great interest to many areas of science and technology as it contains two important transparency windows (3-5 and 8-13 mu m) of the Earth's atmosphere and strong characteristic vibrational transitions displayed by a large number of molecules. Praseodymium (Pr3+) and dysprosium (Dy3+) ions feature characteristic transitions in the mid-IR and transmission range of chalcogenides-based materials spans a large part of the mid-IR. The combination of efficient waveguiding properties with mid-IR light emitters would therefore be a key enabler of the development of mid-IR sensors-on-a-chip for health, security and environmental applications. In this paper, RF magnetron co-sputtering is used to deposit a Dy3+/Pr-3 broken vertical bar-doped chalcogenides guiding layer based on the quaternary system composed of Ga, Ge, Sb and Se atoms on silica cladding layer. The fabrication process of straight ridge waveguides using photolithography and RIE/ICP dry etching is then described. Finally, Dy3+ and Pr3+ mid-IR guided photoluminescence around 2.5 and 4.5 mu m is demonstrated at room temperature using co-propagating pumping at telecommunication wavelengths ( respectively around 1.3 and 1.55 mu m).
Databáze: OpenAIRE