Efficient Optomechanical Mode-Shape Mapping of Micromechanical Devices

Autor: Pedro Soubelet, Jonathan J. Finley, Leopold Moller, David Hoch, Kevin-Jeremy Haas, Timo Sommer, Menno Poot
Jazyk: angličtina
Rok vydání: 2021
Předmět:
Computer science
FOS: Physical sciences
02 engineering and technology
Applied Physics (physics.app-ph)
phase-lock loop
Topology
01 natural sciences
Article
chemistry.chemical_compound
Normal mode
0103 physical sciences
Mesoscale and Nanoscale Physics (cond-mat.mes-hall)
TJ1-1570
Mechanical engineering and machinery
Electrical and Electronic Engineering
010306 general physics
membrane
Optomechanics
Microelectromechanical systems
Condensed Matter - Mesoscale and Nanoscale Physics
Mechanical Engineering
Degenerate energy levels
Multiple modes
Physics - Applied Physics
021001 nanoscience & nanotechnology
optomechanics
Phase-locked loop
MEMS
Silicon nitride
chemistry
Control and Systems Engineering
Line (geometry)
0210 nano-technology
mode-mapping
silicon-nitride
Optics (physics.optics)
Physics - Optics
Zdroj: Micromachines
Volume 12
Issue 8
Micromachines, Vol 12, Iss 880, p 880 (2021)
ISSN: 2072-666X
DOI: 10.3390/mi12080880
Popis: Visualizing eigenmodes is crucial in understanding the behavior of state-of-the-art micromechanical devices. We demonstrate a method to optically map multiple modes of mechanical structures simultaneously. The fast and robust method, based on a modified phase-lock loop, is demonstrated on a silicon nitride membrane and shown to outperform three alternative approaches. Line traces and two-dimensional maps of different modes are acquired. The high quality data enables us to determine the weights of individual contributions in superpositions of degenerate modes.
Databáze: OpenAIRE