Optimization of Piezoresistive Motion Detection for Ambient NEMS Applications
| Autor: | Ezgi Orhan, Chaoyang Ti, Miguel Gonzalez, Ismet I. Kaya, Atakan B. Ari, M. Selim Hanay, Kamil L. Ekinci, Cenk Yanik |
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| Přispěvatelé: | Hanay, Mehmet Selim |
| Rok vydání: | 2020 |
| Předmět: |
Physics
Nanoelectromechanical systems Motion transducer Background reduction Balanced circuit Acoustics Motion detection 02 engineering and technology Parameter space Condensed Matter::Mesoscopic Systems and Quantum Hall Effect 01 natural sciences Piezoresistive effect Signal NEMS Resonator 020303 mechanical engineering & transports Transducer 0203 mechanical engineering Metallic piezoresistance 0103 physical sciences Signal downmixing 010306 general physics |
| Zdroj: | Proceedings of IEEE Sensors |
| DOI: | 10.1109/sensors47125.2020.9278593 |
| Popis: | Date of Conference: 25-28 October 2020 Conference Name: 19th IEEE Conference on Sensors, SENSORS 2020 Electrical readout of nanomechanical motion in ambient pressure and temperature imposes an important challenge for emerging applications of nanoelectromechanical systems (NEMS). Here, we optimize a metallic piezoresistive motion transducer for NEMS resonators in air. The nanomechanical motion of the NEMS resonator serves as a signal down-mixer and enables the detection of the motional signal by a low-frequency circuit. A balanced circuit in the detection loop reduces some of the unwanted background and allows for detection without significant losses. We explore the detection parameter space and use an optimized parameter set to detect the fundamental, second and third harmonic resonances of a NEMS doubly-clamped beam resonator. Our simple circuit model agrees with experimental observations and points the way for further optimization. |
| Databáze: | OpenAIRE |
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