Silver Sintering for Silicon Carbide Die Attach: Process Optimization and Structural Modeling

Autor: Gaetano Sequenzia, Alessandro Sitta, Michele Calabretta, Salvatore Massimo Oliveri
Rok vydání: 2021
Předmět:
mechanical characterization
Technology
Materials science
Silicon
QH301-705.5
silver sintering
QC1-999
Sintering
chemistry.chemical_element
finite element analysis
02 engineering and technology
physical analyses
Die (integrated circuit)
chemistry.chemical_compound
Reliability (semiconductor)
0202 electrical engineering
electronic engineering
information engineering

Silicon carbide
General Materials Science
Process optimization
Power semiconductor device
Biology (General)
Composite material
QD1-999
Instrumentation
Fluid Flow and Transfer Processes
reliability
Physics
Process Chemistry and Technology
General Engineering
020207 software engineering
Engineering (General). Civil engineering (General)
021001 nanoscience & nanotechnology
Durability
Computer Science Applications
Chemistry
chemistry
TA1-2040
0210 nano-technology
Zdroj: Applied Sciences
Volume 11
Issue 15
Applied Sciences, Vol 11, Iss 7012, p 7012 (2021)
ISSN: 2076-3417
Popis: The increasing demand in automotive markets is leading the semiconductor industries to develop high-performance and highly reliable power devices. Silicon carbide MOSFET chips are replacing silicon-based solutions through their improved electric and thermal capabilities. In order to support the development of these novel semiconductors, packaging technologies are evolving to provide enough reliable products. Silver sintering is one of the most promising technologies for die attach. Due to their superior reliability properties with respect to conventional soft solder compounds, dedicated reliability flow and physical analyses should be designed and employed for sintering process optimization and durability assessment. This paper proposes an experimental methodology to optimize the pressure value applied during the silver sintering manufacturing of a silicon carbide power MOSFET molded package. The evaluation of the best pressure value is based on scanning electron microscopy performed after a liquid-to-liquid thermal shock reliability test. Furthermore, the sintering layer degradation is monitored during durability stress by scanning the acoustic microscopy and electric measurement of a temperature sensitive electric parameter. Moreover, mechanical elastoplastic behavior is characterized by uniaxial tensile test for a bulk sample and finite element analysis is developed to predict the mechanical behavior as a function of void fraction inside sintering layer.
Databáze: OpenAIRE