Beam broadening measured in transmission mode at low electron energies in a scanning electron microscope
| Autor: | Dagmar Gerthsen, Milena Hugenschmidt, Erich Müller |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| Předmět: |
Work (thermodynamics)
Materials science Scanning electron microscope Anomalous diffusion STEM-in-SEM TSEM 02 engineering and technology Electron 01 natural sciences 0103 physical sciences Scanning transmission electron microscopy NATURAL sciences & mathematics Instrumentation 010302 applied physics Range (particle radiation) Electron beam broadening Low-energy STEM 021001 nanoscience & nanotechnology Transmission (telecommunications) LVSTEM Cathode ray Physics::Accelerator Physics ddc:500 Atomic physics 0210 nano-technology |
| DOI: | 10.5445/ir/1000123912 |
| Popis: | The broadening of the electron beam in the sample has to be considered when performing scanning transmission electron microscopy (STEM) at low primary electron energies. This work presents direct measurements of the beam broadening in a range of materials. The experimental results are compared with the theoretical model by Gauvin and Rudinsky that uses the concept of anomalous diffusion to obtain an analytical equation for the beam broadening. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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