Nanoimprint Replication of Biomimetic, Multilevel Undercut Nanostructures
| Autor: | Daniel Fechtig, Dieter Nees, Heinz D. Wanzenboeck, Stephan Ruttloff, Philipp Taus, Maria R. Belegratis, Adrian Prinz, Sonja Kopp, Amiya Moharana, Michael Muehlberger |
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| Rok vydání: | 2021 |
| Předmět: |
Fabrication
Nanostructure Materials science General Chemical Engineering Nanotechnology 02 engineering and technology 010402 general chemistry 01 natural sciences Article Nanoimprint lithography law.invention morpho butterfly law General Materials Science nanoimprint lithography biomimetics QD1-999 Replication (microscopy) 021001 nanoscience & nanotechnology 0104 chemical sciences Chemistry Undercut UV-NIL Biomimetics 0210 nano-technology Single layer |
| Zdroj: | Nanomaterials Volume 11 Issue 4 Nanomaterials, Vol 11, Iss 1051, p 1051 (2021) |
| ISSN: | 2079-4991 |
| Popis: | The nanoimprint replication of biomimetic nanostructures can be interesting for a wide range of applications. We demonstrate the process chain for Morpho-blue-inspired nanostructures, which are especially challenging for the nanoimprint process, since they consist of multilayer undercut structures, which typically cannot be replicated using nanoimprint lithography. To achieve this, we used a specially made, proprietary imprint material to firstly allow successful stamp fabrication from an undercut master structure, and secondly to enable UV-based nanoimprinting using the same material. Nanoimprinting was performed on polymer substrates with stamps on polymer backplanes to be compatible with roller-based imprinting processes. We started with single layer undercut structures to finally show that it is possible to successfully replicate a multilayer undercut stamp from a multilayer undercut master and use this stamp to obtain multilayer undercut nanoimprinted samples. |
| Databáze: | OpenAIRE |
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