On the modelling of the direct bonding of two silicon surfaces
| Autor: | Aurelien Maurel-Pantel, Sonia Ait Zaid, Iulian Rosu, Frédéric Lebon, Natacha Cocheteau, Isabelle Savin de Larclause |
|---|---|
| Přispěvatelé: | Matériaux et Structures (M&S), Laboratoire de Mécanique et d'Acoustique [Marseille] (LMA ), Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)-École Centrale de Marseille (ECM), Centre National d'Études Spatiales [Toulouse] (CNES), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2012 |
| Předmět: |
Materials science
Silicon Double Shear Test chemistry.chemical_element 02 engineering and technology Direct bonding Surface finish [SPI.MECA.SOLID]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Solid mechanics [physics.class-ph] Bonding Energy 01 natural sciences wedge test 0103 physical sciences [PHYS.MECA.SOLID]Physics [physics]/Mechanics [physics]/Solid mechanics [physics.class-ph] cleavage Composite material 010302 applied physics silica glasses Hydrogen bond process parameters Mechanical resistance 021001 nanoscience & nanotechnology Zerodur® glasses Surface energy Finite element method Direct Bonding chemistry Adhesive 0210 nano-technology |
| Zdroj: | Proceedings of the Eleventh International Conference on Computational Structures Technology Eleventh International Conference on Computational Structures Technology Eleventh International Conference on Computational Structures Technology, Sep 2012, Dubrovnik, Croatia. ⟨10.4203/ccp.99.143⟩ Scopus-Elsevier |
| DOI: | 10.4203/ccp.99.143⟩ |
| Popis: | International audience; Direct bonding is a well-known process. However in order to use this process in spatial instrument fabrication the mechanical resistance needs to be quantified. In order to improve bonded strength, optimal parameters of the process are found by studying theinfluence of annealing time, temperature and roughness which are studied using three experimental methods: double shear, cleavage and wedge tests. Those parameters are chosen thanks to the appearance of time/temperature equivalence. Results brought out a predictive model of the bonding energy. |
| Databáze: | OpenAIRE |
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