Large Area Photonic Crystal Slabs for Visible Light with Waveguiding Defect Structures: Fabrication with Focused Ion Beam Assisted Laser Interference Lithography
| Autor: | Eliane Flück, Frans B. Segerink, Laura Vogelaar, van Niek F. Hulst, de R.M. Ridder, Wietze Nijdam, Laurens Kuipers, van H.A.G.M. Wolferen |
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| Přispěvatelé: | Optical Sciences |
| Rok vydání: | 2001 |
| Předmět: |
Materials science
Fabrication Laser interference lithography (LIL) business.industry Mechanical Engineering IR-36440 Yablonovite Focused ion beam Photonic metamaterial Focused ion beam (FIB) Photonic crystals Optics Mechanics of Materials Slab Optoelectronics General Materials Science METIS-202027 business Deposition (law) Photonic crystal Visible spectrum |
| Zdroj: | Advanced materials, 13(20), 1551-1554. Wiley-Blackwell |
| ISSN: | 1521-4095 0935-9648 |
| DOI: | 10.1002/1521-4095(200110)13:20<1551::aid-adma1551>3.0.co;2-v |
| Popis: | Extended photonic crystal slabs with light-guiding defects have been created by a combination of laser interference lithography (LIL) and local focused ion beam (FIB) assisted deposition. Large area, highly uniform photonic crystal slabs for visible light are thus made possible. The Figure shows a freestanding Si3N4-air photonic crystal with a light- guiding defect line running along the center of the slab (total length = 1 mm). |
| Databáze: | OpenAIRE |
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