Improved measurement of electric fields by nanobeam precession electron diffraction
| Autor: | Aidan P. Conlan, Victor Boureau, David Cooper, Sebastien Martinie, Jean-Luc Rouvière, L. Bruas |
|---|---|
| Přispěvatelé: | Laboratoire d'Etude des Matériaux par Microscopie Avancée (LEMMA ), Modélisation et Exploration des Matériaux (MEM), Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Grenoble Alpes (UGA)-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Grenoble Alpes (UGA), Département Plate-Forme Technologique (DPFT), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA) |
| Předmět: |
Diffraction
differential phase-contrast Materials science General Physics and Astronomy 02 engineering and technology 01 natural sciences [SPI.MAT]Engineering Sciences [physics]/Materials Optics Electric field 0103 physical sciences Scanning transmission electron microscopy Precession electron diffraction [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics Image resolution 010302 applied physics business.industry 021001 nanoscience & nanotechnology Optical axis [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other] [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic holography Center of mass 0210 nano-technology business Beam (structure) |
| Zdroj: | Journal of Applied Physics Journal of Applied Physics, 2020, 127 (20), pp.205703. ⟨10.1063/5.0006969⟩ |
| ISSN: | 0021-8979 1089-7550 |
| DOI: | 10.1063/5.0006969⟩ |
| Popis: | The electric field in a silicon p-n junction has been measured using pixelated scanning transmission electron microscopy. By using a convergence angle of 3.2mrad, a spatial resolution better than 1nm can be achieved leading to a rigid shift of the transmitted beam as it passes through an electric field. By precessing the beam around the optical axis at an angle of 0.1 degrees, the effects of dynamical diffraction can be reduced. This leads to an improved measurement of the electric field from the shift of the transmitted beam. Different algorithms have been used to measure this shift, and template matching leads to a more accurate measurement of the electric field than the often-used center of mass method. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|