Residue-free suspended graphene transferred by perforated template

Autor:	Sang-Min Kim, Choong-Kwang Lee, Sung-Uk Yoon, Kyung-Shik Kim, Yun Hwangbo
Rok vydání:	2022
Předmět:	Mechanics of Materials Mechanical Engineering General Materials Science Bioengineering General Chemistry Electrical and Electronic Engineering
Zdroj:	Nanotechnology. 33:165301
ISSN:	1361-6528 0957-4484
DOI:	10.1088/1361-6528/ac4664
Popis:	A residue-free transfer method for graphene is proposed in this study, especially for the fabrication of suspended structures. Using perforated polymer templates, graphene can be precisely transferred onto the specific position in the perforated target SiO2/Si substrates without the need for polymer removal and the subsequent thermal annealing process. The surface of the transferred graphene by the proposed method was analyzed and corroborated via Raman spectroscopy, Fourier transform infrared spectroscopy, transmission electron microscopy. The results of these analyses suggest that the graphene surface has no polymeric residues resulting from the transfer process. The proposed method provides a powerful approach for the transfer of 2D materials and it enables the exploitation of their suspended structures for device applications as well as the physical characterizations without worry on the effect of contaminants.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::461b937067b24a5c9350f56637efe23e https://doi.org/10.1088/1361-6528/ac4664 Zobrazit plný text záznamu