Stress control of tensile-strained In$_{1-x}$Ga$_{x}$P nanomechanical string resonators
| Autor: | Claus Gärtner, Maximilian Bückle, Garrett D. Cole, Eva M. Weig, Jörg Grenzer, Ute Zeimer, Valentin C. Hauber |
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| Rok vydání: | 2018 |
| Předmět: |
Diffraction
Materials science Condensed Matter - Mesoscale and Nanoscale Physics Physics and Astronomy (miscellaneous) Modulus FOS: Physical sciences Young's modulus 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Stress (mechanics) symbols.namesake Flexural strength 0103 physical sciences Ultimate tensile strength Mesoscale and Nanoscale Physics (cond-mat.mes-hall) symbols ddc:530 Thin film Composite material 010306 general physics 0210 nano-technology Anisotropy |
| Zdroj: | Applied Physics Letters |
| DOI: | 10.48550/arxiv.1808.09773 |
| Popis: | We investigate the mechanical properties of freely suspended nanostrings fabricated from tensile-stressed, crystalline In1−xGaxP. The intrinsic strain arises during epitaxial growth as a consequence of the lattice mismatch between the thin film and the substrate, and is confirmed by x-ray diffraction measurements. The flexural eigenfrequencies of the nanomechanical string resonators reveal an orientation dependent stress with a maximum value of 650 MPa. The angular dependence is explained by a combination of anisotropic Young's modulus and a change of elastic properties caused by defects. As a function of the crystal orientation, a stress variation of up to 50% is observed. This enables fine tuning of the tensile stress for any given Ga content x, which implies interesting prospects for the study of high Q nanomechanical systems. published |
| Databáze: | OpenAIRE |
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