Periodic sub-micrometric structures using a 3D laser interference pattern
| Autor: | M. Audier, S. Pignard, A.-L. Joudrier, M. Salaün |
|---|---|
| Přispěvatelé: | Laboratoire des matériaux et du génie physique (LMGP ), Institut National Polytechnique de Grenoble (INPG)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS) |
| Rok vydání: | 2007 |
| Předmět: |
Materials science
General Physics and Astronomy 02 engineering and technology Interference (wave propagation) 01 natural sciences law.invention Optics law 0103 physical sciences Photonic crystal 010302 applied physics business.industry Plane (geometry) [CHIM.MATE]Chemical Sciences/Material chemistry Surfaces and Interfaces General Chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics Laser Surfaces Coatings and Films Wavelength Interferometry Oil immersion 0210 nano-technology business Beam (structure) |
| Zdroj: | Applied Surface Science Applied Surface Science, Elsevier, 2007, 253 (19), pp.7947-7951. ⟨10.1016/j.apsusc.2007.02.162⟩ |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/j.apsusc.2007.02.162 |
| Popis: | International audience; A method to obtain three-dimensional sub-micrometric periodic structures is presented. The experimental setup consists in a pulsed UV laser beam source (l = 355 nm) coming into an interferometer in order to generate four beams converging inside a chamber. According to the directions, to the relative intensities and to the polarizations of these four beams, a 3D interference pattern can be obtained inside the overlapping volume of these four beams; the characteristics of the four laser beams have been optimized in order to obtain a maximal contrast of intensity. In order to visualize the interference pattern, its contrast and its stability at each laser pulse, a video camera coupled to an oil immersion microscope objective has been installed above the interferometer. By suppressing the central beam, it is also possible to generate a bidimensional interference pattern which defines an hexagonal structure in the (1 1 1) plane with a period of 377 nm. This optical setup has been used to obtain 3D sub-micrometric periodic structures in negative photoresists. Experiments consist in a one-or multi-pulse irradiation of the photoresist followed by a development procedure which leads to a sub-micrometric face-centred cubic structure cut in a (1 1 1) plane with a cell parameter of 650 nm. The optimization of the experimental conditions is presented for two kinds of photoresists; the role of the substrate according to its reflectivity at the laser wavelength and its influence on the interference pattern is also discussed. # |
| Databáze: | OpenAIRE |
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