Tunable RF MEMS microinductors for future communication systems
| Autor: | J.P. Gilles, Gaelle Lissorgues, Charles-Marie Tassetti |
|---|---|
| Přispěvatelé: | ESIEE Paris, Electronique, Systèmes de communication et Microsystèmes (ESYCOM), Conservatoire National des Arts et Métiers [CNAM] (CNAM), HESAM Université - Communauté d'universités et d'établissements Hautes écoles Sorbonne Arts et métiers université (HESAM)-HESAM Université - Communauté d'universités et d'établissements Hautes écoles Sorbonne Arts et métiers université (HESAM)-Université Paris-Est Marne-la-Vallée (UPEM)-ESIEE Paris |
| Rok vydání: | 2004 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry Equivalent series inductance Electrical engineering Inductor Inductive coupling [SPI.MAT]Engineering Sciences [physics]/Materials [SPI.TRON]Engineering Sciences [physics]/Electronics Computer Science::Other Inductance [SPI.ELEC]Engineering Sciences [physics]/Electromagnetism Surface micromachining Equivalent circuit Radio frequency [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics [SDV.IB.BIO]Life Sciences [q-bio]/Bioengineering/Biomaterials business ComputingMilieux_MISCELLANEOUS |
| Zdroj: | 2003 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference-IMOC 2003 2003 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference-IMOC 2003, 2003, Foz do Iguacu, Brazil. pp.541-545, ⟨10.1109/IMOC.2003.1244918⟩ |
| DOI: | 10.1109/imoc.2003.1244918 |
| Popis: | Tunable microinductors; can be designed controlling the magnetic coupling coefficient. This paper presents the design and fabrication of a new tunable RF MEMS microinductor. This component requires electrostatic actuators to control the inductance value. We report a 50% inductance variation from 1.5 to 5GHz measured on test wafers. A method to compute the inductance variation due to the mechanical displacement is briefly described. A compact lumped element model, based on the geometry, gives results in good agreement with measurements in the RF frequency range. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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