| Popis: |
By applying piezoelectric sensors (bimorphs or monomorphs) in Scanning Acoustic Microscopy, a considerable simplification of the measurement set-up was achieved, i.e., a complex optical method of measuring cantilever vibrations was replaced by the piezoelectric method. As an innovation we applied a direct contact between the cantilever tip and the investigated surface. The electric voltage generated by those sensors was proportional to the cantilever deflection. The developed model of scanning ultrasonic contact microscope was used to investigate the surface properties of VLSI integrated circuits (EPROM memories) and PZT ceramics. |
