Microfluidic resonators with two parallel channels for independent sample loading and effective density tuning
| Autor: | Bong Jae Lee, Faheem Khan, Thomas Thundat, Jungchul Lee |
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| Rok vydání: | 2020 |
| Předmět: |
Materials science
Density sensing Microfluidics Biomedical Engineering 02 engineering and technology lcsh:Technology 01 natural sciences Biomaterials chemistry.chemical_compound Resonator Wafer Fluidics Microchannel lcsh:T business.industry 010401 analytical chemistry Sacrificial process 021001 nanoscience & nanotechnology 0104 chemical sciences Silicon nitride chemistry Batch fabrication Microfluidic resonator Optoelectronics Density tuning 0210 nano-technology business Laser Doppler vibrometer Beam (structure) Vacuum clamp |
| Zdroj: | Micro and Nano Systems Letters, Vol 8, Iss 1, Pp 1-7 (2020) |
| ISSN: | 2213-9621 |
| DOI: | 10.1186/s40486-020-00119-8 |
| Popis: | This paper reports doubly clamped microchannel embedded resonators with two independent and parallel channels integrated for effective sample density tuning for the first time. With the aid of such a unique design, each fluidic channel can be independently accessed thus different liquid samples can be loaded simultaneously. The proposed fluidic resonators are batch fabricated by depositing silicon nitride, polysilicon, and silicon nitride sequentially on top of a set of 4-inch silicon wafers and sacrificing the middle polysilicon layer with potassium hydroxide (KOH). The sacrificial process defines two parallel channels and releases doubly clamped beam resonators simultaneously. In addition, an off-chip vacuum clamp with optical and fluidic access is custom-made to operate each resonator with enhanced quality factor. The microfluidic resonators mounted on the custom vacuum clamp are thoroughly characterized with a laser Doppler vibrometer and used to measure the effective sample density ranging from 395 to 998 kg/m3. |
| Databáze: | OpenAIRE |
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