Calculations of Auger intensity versus beam position for a sample with layers perpendicular to its surface
| Autor: | Zommer, L, Jablonski, A, Senoner M, Th, Wirth, Unger W, Osterle W, Kaiander I |
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| Přispěvatelé: | Institute of physical chemistry, Polska Akademia Nauk = Polish Academy of Sciences (PAN) |
| Jazyk: | angličtina |
| Rok vydání: | 2010 |
| Předmět: |
elastic and inelastic scattering
Acoustics and Ultrasonics Silicon Scanning electron microscope Monte Carlo method chemistry.chemical_element 02 engineering and technology Electron Auger current 01 natural sciences Molecular physics Backscattering yield Auger Optics 0103 physical sciences Perpendicular 010302 applied physics Chemistry business.industry Electron-solid interactions Computer simulation 021001 nanoscience & nanotechnology Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Monte Carlo algorithm Atomic number 0210 nano-technology business Continuous slowing down approximation Beam (structure) |
| Zdroj: | Journal of Physics D: Applied Physics Journal of Physics D: Applied Physics, IOP Publishing, 2010, 43 (27), pp.275301. ⟨10.1088/0022-3727/43/27/275301⟩ |
| ISSN: | 0022-3727 1361-6463 |
| DOI: | 10.1088/0022-3727/43/27/275301⟩ |
| Popis: | Recent advances in nanotechnology are a driving force for the improvement of lateral resolution in advanced analytical techniques such as scanning electron microscopy or scanning Auger microscopy (SAM). Special samples with multilayers which are perpendicular to their surface are presently proposed for testing the lateral resolution, as discussed in recent works of Senoner et al (2004 Surf. Interface Anal. 36 1423). The relevant experiment needs a theoretical description based on recent progress in the theory. Monte Carlo simulations of electron trajectories make possible an accurate description of the considered system. We selected exemplary samples, with layers perpendicular to the surface. The layer materials are elemental solids with high, medium and low atomic numbers, i.e. Au|Cu|Au and Au|Si|Au. For these systems calculations of the Auger current versus beam position were performed. We found that, for a system with layers consisting of elements of considerably different atomic numbers, the relation can have an unexpected extreme. This observation can be important in analysis of SAM pictures. |
| Databáze: | OpenAIRE |
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