Correlated diffuse x-ray scattering from periodically nanostructured surfaces
| Autor: | Michael Krumrey, Jan Wernecke, Victor Soltwisch, Sven Burger, Anton Haase, Max Schoengen, Juergen Probst, Frank Scholze |
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| Rok vydání: | 2016 |
| Předmět: |
Diffraction
Total internal reflection Materials science Condensed Matter - Mesoscale and Nanoscale Physics business.industry Scattering X-ray FOS: Physical sciences 02 engineering and technology Grating 021001 nanoscience & nanotechnology 01 natural sciences Molecular physics Light scattering diffuse x ray scattering nanostructured surfaces GISAXS Optics 0103 physical sciences Mesoscale and Nanoscale Physics (cond-mat.mes-hall) Surface roughness Biological small-angle scattering 010306 general physics 0210 nano-technology business |
| Zdroj: | Physical Review B |
| ISSN: | 2469-9950 |
| DOI: | 10.1103/PhysRevB.94.035419 |
| Popis: | Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering. To support an improved reconstruction of nanostructured surface geometries, we investigated the origin of the contributions to the diffuse scattering pattern which is correlated to the surface roughness. Resonant diffuse scattering leads to a palm-like structure of intensity sheets. Dynamic scattering generates the so-called Yoneda band caused by a resonant scatter enhancement at the critical angle of total reflection and higher-order Yoneda bands originating from a subsequent diffraction of the Yoneda enhanced scattering at the grating. Our explanations are supported by modelling using a solver for the time-harmonic Maxwell's equations based on the finite-element method. |
| Databáze: | OpenAIRE |
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