Hollow silicon microneedle fabrication using advanced plasma etch technologies for applications in transdermal drug delivery
| Autor: | Huma Ashraf, Chris Bolton, Pey F. Eng, Gareth J. Blayney, Kerry Roberts, Owen J. Guy, Benedetta Gualeni, James Caradoc Birchall, Olivia Howells |
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| Rok vydání: | 2020 |
| Předmět: |
Silicon
Technology Materials science Fabrication Microinjections Biomedical Engineering chemistry.chemical_element Bioengineering 02 engineering and technology Administration Cutaneous Biochemistry 030207 dermatology & venereal diseases 03 medical and health sciences Plasma 0302 clinical medicine Drug Delivery Systems Etching (microfabrication) Deep reactive-ion etching Humans Transdermal Plasma etching technology industry and agriculture General Chemistry 021001 nanoscience & nanotechnology Bevel chemistry Pharmaceutical Preparations Needles Needle insertion 0210 nano-technology Biomedical engineering |
| Zdroj: | Lab on a chip. 20(15) |
| ISSN: | 1473-0189 1473-0197 |
| Popis: | A novel production process flow is presented here for the manufacture of hollow silicon microneedles using deep reactive-ion etching (DRIE) technology. The patent-pending three-step process flow has been developed to produce multiple arrays of sharp-tipped, hollow microneedles, which facilitate easy insertion and controlled fluid injection into excised skin samples. A bevelled tip and vertical sidewalls for the microneedle have been achieved with good uniformity, despite >45% open etch area. Processing steps and etch challenges are discussed, and preliminary skin testing results are presented, showing effective needle insertion and delivery of fluorescent dye into ex vivo skin from human breast tissue. |
| Databáze: | OpenAIRE |
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