Co-integrated microfluidic and THz functions for biochip devices
| Autor: | A. Treizebre, Simon Laurette, B. Bocquet |
|---|---|
| Přispěvatelé: | Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF) |
| Jazyk: | angličtina |
| Rok vydání: | 2011 |
| Předmět: |
Materials science
Wafer bonding Terahertz radiation Mechanical Engineering 010401 analytical chemistry Microfluidics Nanotechnology 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences 0104 chemical sciences Electronic Optical and Magnetic Materials [SPI]Engineering Sciences [physics] Mechanics of Materials Microsystem Wafer Fluidics Electrical and Electronic Engineering 0210 nano-technology Biochip Electronic circuit |
| Zdroj: | Journal of Micromechanics and Microengineering Journal of Micromechanics and Microengineering, 2011, 21, pp.065029-1-8. ⟨10.1088/0960-1317/21/6/065029⟩ Journal of Micromechanics and Microengineering, IOP Publishing, 2011, 21, pp.065029-1-8. ⟨10.1088/0960-1317/21/6/065029⟩ |
| ISSN: | 0960-1317 1361-6439 |
| Popis: | International audience; TeraHertz (THz) spectroscopy is becoming an alternative way to probe biological interactions in real-time conditions. However, accurate and reproducible THz measurements of aqueous solutions, largely represented in life sciences, remain difficult. A THz microsystem which couples both electromagnetic and microfluidic integrated functions is presented here. Its technological process is accurately detailed and enables easy designs of advanced THz and microfluidic functions. It is composed of the deposition of gold wires on a glass wafer to guide the THz waves. Then, a whole silicon wafer is bonded by using a thermosensitive-polymer thermo-compression. Silicon is deep-etched to create the microchannels which are finally covered with a second glass wafer. This bonding–etching process enables huge freedom and independence for electromagnetic and microfluidic designs. The technological process characterization has shown that the manufactured biochip is compatible with pressures up to 37 bar. First measurements with empty and water-filled channels have been carried out and have shown the ability to perform THz spectroscopy inside the chip. Then, first measurements on proteins have been performed and shown the system ability to probe protein concentration. This kind of microfluidic microsystem, allowing complex design for integrated electronic and microfluidic circuits, defines a true new instrumental way for life science investigations. |
| Databáze: | OpenAIRE |
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