Studi Penumbuhan Film Tipis Ti(1-x)Co(x)O(2) dengan Teknik MOCVD Menggunakan Prekurosr Titanium (IV) Isopropoxide dan Tris (2,2,6,6-tetramethyl-3,5-heptanedionato) Cobalt (III)

Autor: Edy Supriyanto, Horasdia Saragih, Pepen Arifin, M. Barmawi
Rok vydání: 2006
Předmět:
Zdroj: Journal of Mathematical and Fundamental Sciences, Vol 38, Iss 2 (2013)
ISSN: 1978-3043
Popis: The Ti 1-x Co x O 2 thin films have been grown by MOCVD technique using titanium (IV) isopropoxide (TTIP) and tris (2,2,6,6-tetramethyl-3, 5-heptanedionato) Cobalt (III ) [Co(TMHD) 3 ] powder precursors. The tetrahydrofuran (THF) were used as a solvent to get a Co(TMHD) 3 solution. Characteristics of precursor and growth parameters were investigated. The Co concentration in thin films were varied. The room temperature ferromagnetic properties of Ti 1-x Co x O 2 thin films were obtained. Solubility of Co atom in TiO 2 lattice were found at about 11%. The surface morphology of films are homogen and relatively smooth.
Databáze: OpenAIRE