Imaging ellipsometry for curved surfaces
| Autor: | Jürgen Beyerer, Christian Negara, Thomas Längle |
|---|---|
| Přispěvatelé: | Publica |
| Rok vydání: | 2020 |
| Předmět: |
010302 applied physics
Diffraction Surface (mathematics) Materials science Scattering business.industry Process Chemistry and Technology Reflector (antenna) 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Retroreflector Surfaces Coatings and Films Electronic Optical and Magnetic Materials Characterization (materials science) Optics Ellipsometry 0103 physical sciences Materials Chemistry Reflection (physics) Electrical and Electronic Engineering 0210 nano-technology business Instrumentation |
| Zdroj: | Journal of Vacuum Science & Technology B. 38:014016 |
| ISSN: | 2166-2754 2166-2746 |
| DOI: | 10.1116/1.5129654 |
| Popis: | The authors propose a new design of an imaging return-path ellipsometer, which enables reflection-based measurements of both flat and curved surfaces. Return-path ellipsometry (RPE) based on mirrors cannot be applied to surface characterization of a specimen with a free-form shape. The authors circumvent this restriction by using microsphere-based retroreflectors instead of a mirror. The measurement equation for retro reflection-based RPE is very similar to that for mirror-based RPE. Therefore, the authors first outline the difference between conventional (unidirectional) and return-path (bidirectional) ellipsometry by focusing on Mueller-matrix ellipsometry. Furthermore, they present a new ellipsometer consisting of a rotating reflector to determine the surface inclination for almost arbitrary media when scattering and diffraction are negligible. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|