A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense Interface
Autor: | Qinwen Fan, A. C. de Oliveira, Remco J. Wiegerink, T. V. P. Schut, Kofi A. A. Makinwa, Jarno Groenesteijn |
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Přispěvatelé: | Integrated Devices and Systems |
Rok vydání: | 2019 |
Předmět: |
Mass flow sensor
Mass flow 02 engineering and technology 01 natural sciences Noise (electronics) law.invention Gyroscopic law 0202 electrical engineering electronic engineering information engineering Sensor interface Physics Coriolis 22/3 OA procedure business.industry 020208 electrical & electronic engineering 010401 analytical chemistry Electrical engineering Gyroscope Sense (electronics) 0104 chemical sciences MEMS Capacitor Electromagnetic coil Magnet business |
Zdroj: | 2019 IEEE Sensors: SENSORS 2019-Conference Proceedings 2019 IEEE Sensors 2019 IEEE Sensors, SENSORS 2019-Conference Proceedings, 2019-October |
Popis: | This paper describes an interface circuit for a MEMS Coriolis mass flow sensor that combines both drive and sense circuitry. The MEMS sensor consists of a suspended resonant tube, which is read-out by comb capacitors and driven into oscillation by current flowing through a drive coil in a magnet field. The interface circuit comprises a low-noise front-end that performs capacitance-to-voltage (C/V) conversion, and a drive-loop with automatic amplitude control. Drive motion can also be detected from the output of the front-end, allowing both drive and sense functions to be combined. The front-end is chopped to mitigate its 1/ f noise. When implemented with commercial off-the-shelf (COTS) components, the proposed interface draws 250 mA from a single 5-V supply. Mass flow measurements with Nitrogen gas (N2) show that the sensor's drive frequency drifts by less than 1 mHz (rms) per hour, while its zero stability is less than 2.6 mg/h during an 80s measurement. |
Databáze: | OpenAIRE |
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