Demonstration of atomic force microscopy imaging using an integrated opto-electro-mechanical transducer
| Autor: | Frank W. M. van Otten, Maurangelo Petruzzella, Abbas Mohtashami, Federico Galeotti, Andrea Fiore, Rob W. van der Heijden, Hamed Sadeghian Marnani, Gustav Lindgren |
|---|---|
| Přispěvatelé: | Semiconductor Nanophotonics, Photonics and Semiconductor Nanophysics, NanoLab@TU/e, Group Lopez Arteaga, Dynamics and Control, EAISI Health |
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
Materials science
business.industry Integrated displacement sensor Photodetector Physics::Optics Waveguide (optics) Atomic and Molecular Physics and Optics Displacement (vector) Electronic Optical and Magnetic Materials Metrology Opto-electro-mechanics Transducer Miniaturization Optoelectronics Photonic crystal AFM business Instrumentation Throughput (business) |
| Zdroj: | Ultramicroscopy, 230:113368. Elsevier |
| ISSN: | 0304-3991 |
| DOI: | 10.1016/j.ultramic.2021.113368 |
| Popis: | The low throughput of atomic force microscopy (AFM) is the main drawback in its large-scale deployment in industrial metrology. A promising solution would be based on the parallelization of the scanning probe system, allowing acquisition of the image by an array of probes operating simultaneously. A key step for reaching this goal relies on the miniaturization and integration of the sensing mechanism. Here, we demonstrate AFM imaging employing an on-chip displacement sensor, based on a photonic crystal cavity, combined with an integrated photodetector and coupled to an on-chip waveguide. This fully-integrated sensor allows high-sensitivity and high-resolution in a very small footprint and its readout is compatible with current commercial AFM systems. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect