Towards Integrated Optical Feedback FM-to-AM Conversion in Silicon Nitride for Displacement Sensing Applications

Autor:	Clement Deleau, Thidsanu Apiphatnaphakul, Han Cheng Seat, Frederic Surre, Usman Zabit, Franck Carcenac, Pierre-Francois Calmon, Thierry Bosch, Olivier Bernal
Přispěvatelé:	Equipe Capteurs optiques et systèmes intégrés intelligents (LAAS-OASIS), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Institut National Polytechnique (Toulouse) (Toulouse INP), Ecole Nationale Supérieure d'Electrotechnique, d'Electronique, d'Informatique, d'Hydraulique et de Télécommunications (ENSEEIHT), Université de Toulouse (UT)-Université de Toulouse (UT), James Watt School of Engineering [Univ Glasgow], University of Glasgow, National University of Sciences and Technology [Islamabad] (NUST), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), ANR-20-CE42-0010,PICSONDE,Circuit Intégré Photonique couplé à un Système sur Puce pour un capteur de déplacement sub-picométrique(2020)
Rok vydání:	2022
Předmět:	frequency modulation self-mixing [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic Integrated Photonics Optical feedback interferometry displacement sensing OFI
Zdroj:	Proceedings of the 2022 IEEE Sensors 2022 IEEE Sensors 2022 IEEE Sensors, Oct 2022, Dallas, United States. pp.1-4, ⟨10.1109/SENSORS52175.2022.9967153⟩
Popis:	International audience; In this paper, we demonstrate the potential of silicon nitride integrated edge filters to perform frequency to amplitude (FM-to-AM) conversion of optical feedback interferometric (OFI) signals to achieve better signal-to-noise ratio than the typical AM OFI signals. Compared to already existing OFI FM-to-AM conversion techniques such as edge filters based on gas cells, and free-space or fiber Mach Zehnder interferometer (MZI), integrated photonic processing of OFI signals can offer greater compactness and design flexibility. In addition, compactness can also indirectly improve noise performances by facilitating temperature control of the chip and allowing a higher immunity to parasitic mechanical vibrations. The FM OFI detection is performed with an integrated MZI with a 2 cm imbalanced path- length implemented on a silicon nitride process. The achieved OFI FM-to-AM conversion factor is 0.83 (GHZ)-l and the noise equivalent displacement is 16 nm for a 1 kHz bandwidth.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3d958b09783b98809f39424e8d394eaf https://doi.org/10.1109/sensors52175.2022.9967153 Zobrazit plný text záznamu