Rapid fabrication of diffractive optical elements by use of image-based excimer laser ablation
| Autor: | James R. Leger, Robert H. Rediker, Xiaomei Wang |
|---|---|
| Rok vydání: | 1997 |
| Předmět: |
Diffraction
Materials science Excimer laser business.industry Materials Science (miscellaneous) medicine.medical_treatment Ablation Diffraction efficiency Laser Industrial and Manufacturing Engineering law.invention X-ray laser Lens (optics) Optics law medicine Optoelectronics Focal length Business and International Management business |
| Zdroj: | Applied Optics. 36:4660 |
| ISSN: | 1539-4522 0003-6935 |
| DOI: | 10.1364/ao.36.004660 |
| Popis: | We describe a method of fabricating multilevel diffractive optics by excimer laser ablation. A portion of a chrome mask containing many patterns is illuminated by 193-nm laser light and imaged by an objective lens onto a poly(imide) substrate. Ablation of an entire single pattern is achieved in a single laser pulse. Multiple pulses are used to vary the ablation depth, and multiple patterns are used to create a variety of multilevel optics. We have successfully fabricated arrays of eight-level diffractive microlenses with varying focal lengths and decenters. The optics performed with diffraction-limited focusing and near-theoretical diffraction efficiency (92%). |
| Databáze: | OpenAIRE |
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