Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer
| Autor: | Carlos Yáñez, Reza Atashkhooei, Francisco J. Azcona, Ajit Jha, Santiago Royo |
|---|---|
| Přispěvatelé: | Universitat Politècnica de Catalunya. Departament d'Òptica i Optometria, Universitat Politècnica de Catalunya. GREO - Grup de Recerca en Enginyeria Òptica |
| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: |
Ciències de la visió::Òptica física [Àrees temàtiques de la UPC]
Cantilever Materials science displacement measurement Mesurament -- Instruments 02 engineering and technology lcsh:Chemical technology Enginyeria dels materials [Àrees temàtiques de la UPC] Biochemistry Optical fiber detectors optical feedback interferometry Displacement (vector) Article Analytical Chemistry 020210 optoelectronics & photonics Optics nanometric resolution atomic force microscopy 0202 electrical engineering electronic engineering information engineering lcsh:TP1-1185 Electrical and Electronic Engineering Instrumentation Detectors òptics Nanociència business.industry Detector Motion detection Ranging Microscòpia de força atòmica Resolution (Optics) 021001 nanoscience & nanotechnology Atomic and Molecular Physics and Optics Computer Science::Other Interferometry Nanoscience Amplitude Trajectory Measuring instruments Detectors de fibra òptica Enginyeria electrònica::Instrumentació i mesura [Àrees temàtiques de la UPC] 0210 nano-technology business |
| Zdroj: | UPCommons. Portal del coneixement obert de la UPC Universitat Politècnica de Catalunya (UPC) Sensors (Basel, Switzerland) Sensors, Vol 16, Iss 7, p 997 (2016) Sensors; Volume 16; Issue 7; Pages: 997 Recercat. Dipósit de la Recerca de Catalunya instname |
| Popis: | Microcantilever motion detection is a useful tool for the characterization of the physical, chemical and biological properties of materials. In the past, different approaches have been proposed and tested to enhance the behavior, size and simplicity of microcantilever motion detectors. In this paper, a new approach to measure microcantilever motion with nanometric resolution is presented. The proposed approach is based on the concept of mechanically-modulated optical feedback interferometry, a technique that has shown displacement measurement capabilities well within the nanometric scale and that, due to its size, compactness and low cost, may be a suitable choice for measuring nanometric motions in cantilever-like sensors. It will be shown that the sensor, in its current state of development, is capable of following a cantilever sinusoidal trajectory at different sets of frequencies ranging up to 200 Hz and peak to peak amplitudes up to λ / 2 with experimental resolutions in the λ / 100 range. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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