Image-based pupil plane characterization via a space-domain basis
| Autor: | Andrew Burbine, Bruce W. Smith, Zac Levinson, Kenneth A. Goldberg, Obert Wood, Erik Verduijn, Antoine Wojdyla, Markus P. Benk |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
EUV aberrations
principal component analysis Zernike polynomials aberration metrology Phase (waves) Optical Physics 02 engineering and technology pupil characterization 01 natural sciences Pupil law.invention 010309 optics symbols.namesake Optics law 0103 physical sciences Pupil function Reticle Nanoscience & Nanotechnology Electrical and Electronic Engineering Physics Basis (linear algebra) business.industry Plane (geometry) Mechanical Engineering 021001 nanoscience & nanotechnology Condensed Matter Physics Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials Lens (optics) EUV lithography symbols image-based aberration metrology 0210 nano-technology business |
| Zdroj: | Levinson, Z; Burbine, A; Verduijn, E; Wood, O; Goldberg, KA; Benk, MP; et al.(2017). Image-based pupil plane characterization via a space-domain basis. Journal of Micro/ Nanolithography, MEMS, and MOEMS, 16(2). doi: 10.1117/1.JMM.16.2.023509. Lawrence Berkeley National Laboratory: Retrieved from: http://www.escholarship.org/uc/item/5j99929s Journal of Micro/Nanopatterning Materials and Metrology, vol 16, iss 2 Journal of Micro/ Nanolithography, MEMS, and MOEMS, vol 16, iss 2 |
| ISSN: | 1932-5150 |
| Popis: | © 2017 Society of Photo-Optical Instrumentation Engineers (SPIE). Aberration characterization plays a critical role in the development of any optical system. State-of-the-art lithography systems have the tightest aberration tolerances. We present an approach to image-based pupil plane amplitude and phase characterization using models built with a space-domain basis, in which aberration effects are separable. A polynomial model is constructed between the projections of the image intensity for chosen binary mask targets onto this basis and pupil amplitude or phase variation. This method separates model building and pupil characterization into two distinct steps, thus enabling rapid pupil characterization following data collection. The basis is related to both the transmission cross-coefficient function and the principal components of the image intensity. The pupil plane variation of a zone-plate lens from the Semiconductor High-NA Actinic Reticle Review Project (SHARP) at Lawrence Berkeley National Laboratory is examined using this method. Results are compared to pupil plane characterization using a previously proposed methodology where inverse solutions are obtained through an iterative process involving least-squares regression. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|