| Autor: |
Dennis Alveringh, Daniel G. Bijsterveld, Tomas E. van den Berg, Henk-Willem Veltkamp, Kevin. M. Batenburg, Remco. G. P. Sanders, Joost C. Lotters, Remco J. Wiegerink |
| Přispěvatelé: |
Integrated Devices and Systems, MESA+ Institute, University of Twente |
| Jazyk: |
angličtina |
| Rok vydání: |
2022 |
| Předmět: |
|
| Zdroj: |
2022 IEEE Sensors |
| Popis: |
Closely packed plant canopies have a negative influence on the uniformity of conditioned air and therefore induce physiological disorders inside plant production systems. Real-time leaf-level flow measurements help to improve the microclimate. This application needs a small and low-cost flow sensor for a flow regime up to 1 m/s . The chip that is presented in this paper consists of five suspended heavily p-doped silicon beams with resistors integrated in the tip. A fluid flow along these tips causes a temperature difference between the resistors by convective heat transfer, enabling calorimetric flow sensing. The 4.4 mm by 3.6 mm sensor is realized in a three-mask versatile fabrication process. The sensor shows a range of 1 m/s to 3 m/s for air with a maximum sensitivity of 1.8 mVs/m and a standard deviation-based accuracy of 3.6 cm/s. The sensor design is easily scalable in theory, hence, a redesign will be made with a slightly lower flow range to fully meet the requirements for the application. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
