Fabrication and characterization of a force coupled sensor–actuator system for adjustable resonant low frequency vibration detection
| Autor: | Roman Forke, Thomas Gessner, Wolfram Dötzel, Jan Mehner, Dirk Scheibner, Karla Hiller |
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| Přispěvatelé: | Publica |
| Rok vydání: | 2008 |
| Předmět: |
Coupling
Microelectromechanical systems Physics Fabrication business.industry Acoustics Superheterodyne receiver Metals and Alloys Electrical engineering Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Vibration Resonator law Active vibration control Electrical and Electronic Engineering Actuator business Instrumentation |
| Zdroj: | Sensors and Actuators A: Physical. :245-256 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/j.sna.2007.12.032 |
| Popis: | Micromechanical resonators for vibration sensing are typically limited to frequencies above 1 kHz [D. Scheibner, J. Mehner, D. Reuter, T. Gessner, W. Dotzel, A spectral vibration detection system based on tunable micromechanical resonators, Sens. Actuators A 123–124 (2005), 63–72]. A novel method for resonant vibration detection at lower frequencies is introduced in the literature [R. Forke, D. Scheibner, J. Mehner, T. Gessner, W. Dotzel, Electrostatic force coupling of MEMS oscillators for spectral vibration measurements, Sens. Actuators A: Phys. (2007), doi:10.1016/j.sna.2007.04.004 ]. The micro-electro-mechanical-system (MEMS) operates at standard pressure and utilizes the superheterodyne principle well known from information technologies. By mixing the low frequency vibration with a high frequency carrier, the information of the vibration is transformed into a higher frequency range. A resonant oscillator amplifies and filters the information. This paper reports on the characterization and the silicon technology of the force coupled oscillator system (FCOS). |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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