| Autor: |
Juergen Brugger, Maurizio R. Gullo, Massimo Mastrangeli, Loïc Jacot-Descombes |
| Rok vydání: |
2014 |
| Předmět: |
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| Zdroj: |
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS). |
| DOI: |
10.1109/memsys.2014.6765572 |
| Popis: |
We present a new method to encapsulate functional liquids into sealed MEMS capsules by fluidic self-assembly. Self-assembly of 200 mu m SU-8 cargos and picoliter liquid co-encapsulation are driven by the interplay of global fluidic drag and short-range capillary forces. The latter ensues from the localized surface-selective precipitation of a photopolymerizable adhesive onto the capsules' rim. Assembly yield higher than 50% is achieved, and can be improved by optimized agitation and shape matching. The method is massively parallel, scalable and compatible with batch MEMS fabrication. It can address a variety of applications, including distributed MEMS, cell encapsulation and drug delivery. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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