Bidirectional Linear Motion by Travelling Waves on Legged Piezoelectric Microfabricated Plates
| Autor: | Abdallah Ababneh, J. Toledo, Helmut Seidel, J. Hernando-García, Víctor Ruiz-Díez, José Luis Sánchez-Rojas |
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| Jazyk: | angličtina |
| Rok vydání: | 2020 |
| Předmět: |
Fabrication
Materials science lcsh:Mechanical engineering and machinery Acoustics bidirectional linear motion 02 engineering and technology 01 natural sciences Article Slider 0103 physical sciences lcsh:TJ1-1570 Standing wave ratio Electrical and Electronic Engineering AlN 010302 applied physics Microelectromechanical systems travelling wave Mechanical Engineering conveyor Linear actuator 021001 nanoscience & nanotechnology Piezoelectricity MEMS Amplitude Control and Systems Engineering Linear motion piezoelectric 0210 nano-technology |
| Zdroj: | Micromachines Volume 11 Issue 5 Micromachines, Vol 11, Iss 517, p 517 (2020) |
| DOI: | 10.22028/d291-31053 |
| Popis: | This paper reports the design, fabrication and performance of MEMS-based piezoelectric bidirectional conveyors featuring 3D printed legs, driven by linear travelling waves (TW). The structures consisted of an aluminium&ndash nitride (AlN) piezoelectric film on top of millimetre-sized rectangular thin silicon bridges and two electrode patches. The position and size of the patches were analytically optimised for TW generation in three frequency ranges: 19, 112 and 420 kHz, by the proper combination of two contiguous flexural modes. After fabrication, the generated TW were characterized by means of Laser&ndash Doppler vibrometry to obtain the relevant tables of merit, such as the standing wave ratio and the average amplitude. The experimental results agreed with the simulation, showing the generation of a TW with an amplitude as high as 6 nm/V and a standing wave ratio as low as 1.46 for a device working at 19.3 kHz. The applicability of the fabricated linear actuator device as a conveyor was investigated. Its kinetic performance was studied with sliders of different mass, being able to carry a 35 mg silicon slider, 18 times its weight, with 6 V of continuous sinusoidal excitation and a speed of 0.65 mm/s. A lighter slider, weighting only 3 mg, reached a mean speed of 1.7 mm/s at 6 V. In addition, by applying a burst sinusoidal excitation comprising 10 cycles, the TW generated in the bridge surface was able to move a 23 mg slider in discrete steps of 70 nm, in both directions, which is a promising result for a TW piezoelectric actuator of this size. |
| Databáze: | OpenAIRE |
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