Lithium niobate thick films grown by RF sputtering : correlation between optical analysis and transmission electron microscopy observations
| Autor: | Elhadj Dogheche, X. Lansiaux, Denis Remiens |
|---|---|
| Přispěvatelé: | Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF) |
| Jazyk: | angličtina |
| Rok vydání: | 2000 |
| Předmět: |
Materials science
Lithium niobate 02 engineering and technology Substrate (electronics) Epitaxy 01 natural sciences chemistry.chemical_compound Optics Sputtering 0103 physical sciences Materials Chemistry Electrical and Electronic Engineering Deposition (law) 010302 applied physics business.industry Sputter deposition 021001 nanoscience & nanotechnology Condensed Matter Physics Electronic Optical and Magnetic Materials chemistry Control and Systems Engineering Transmission electron microscopy Ceramics and Composites Sapphire Optoelectronics 0210 nano-technology business |
| Zdroj: | Integrated Ferroelectrics Integrated Ferroelectrics, Taylor & Francis, 2000, 31, pp.105-116 Scopus-Elsevier Integrated Ferroelectrics, 2000, 31, pp.105-116 |
| ISSN: | 1058-4587 |
| Popis: | We report on the low temperature process for depositing epitaxial LiNbO3 (0001) thick films on sapphire (0001) substrates by radio-frequency magnetron sputtering. To obtain this objective, we have developed a multi-steps process. Structural studies carried out through x-ray Θ-2Θ and phi scans measurements revealed that the epitaxy is verified at a substrate temperature of 490°C whatever the film thickness. The crystalline properties and the surface morphologies are rather conserved in the multi-steps process of deposition. Optical prism coupling characterizations have been carried out to qualify the film and the interface between the film and the substrate. A discussion is proposed in relationship with transmission electron microscopy (TEM) analysis. |
| Databáze: | OpenAIRE |
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