Long-term changes in Al thin-film extreme ultraviolet filters

Autor:	V. Stelmashuk, Petr Hoffer, Jiri Schmidt, Petr Jiricek, J. Houdkova, Karel Kolacek, Andrii Tuholukov, Jaroslav Straus, Alexandr Frolov
Rok vydání:	2021
Předmět:	Materials science Stray light business.industry X-ray optics Atomic and Molecular Physics and Optics Amorphous solid Atmosphere Optics Extreme ultraviolet Transmittance Electrical and Electronic Engineering Thin film business Engineering (miscellaneous) Visible spectrum
Zdroj:	Applied Optics. 60:8766
ISSN:	2155-3165 1559-128X
DOI:	10.1364/ao.432592
Popis:	Thin-film Al filters are very popular owing to their high transmittance in the wavelength range of 17–67 nm and low transmittance in the visible and near-UV regions; however, they are prone to oxidation. The amorphous A l 2 O 3 layers on the Al surfaces have much smaller transmittance than the bulk Al material; therefore, they strongly influence the total transmittance of the filter. This paper not only provides the transmittance of very old Al filters but also maps the transmittance development of Al filters over two years since their delivery (in 2016) in an uncontrolled atmosphere.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::397d1cf1b96eaf6bb0da016f6a756103 https://doi.org/10.1364/ao.432592 Zobrazit plný text záznamu