Highly Stable Liquid Metal-Based Pressure Sensor Integrated with aMicrofluidic Channel
| Autor: | Taekeon Jung, Sung Yang |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2015 |
| Předmět: |
Liquid metal
Materials science pressure sensor liquid metal galinstan microfluidic viscosity Microfluidics lcsh:Chemical technology Biochemistry Soft lithography Article Analytical Chemistry law.invention chemistry.chemical_compound law Metals Heavy Calibration Electronic engineering Alloys Pressure lcsh:TP1-1185 Electrical and Electronic Engineering Instrumentation business.industry Viscosity Viscometer Equipment Design Microfluidic Analytical Techniques Pressure sensor Atomic and Molecular Physics and Optics Galinstan Pressure measurement chemistry Optoelectronics business |
| Zdroj: | SENSORS(15): 5 Sensors (Basel, Switzerland) Sensors Volume 15 Issue 5 Pages 11823-11835 Sensors, Vol 15, Iss 5, Pp 11823-11835 (2015) |
| Popis: | Pressure measurement is considered one of the key parameters in microfluidic systems. It has been widely used in various fields, such as in biology and biomedical fields. The electrical measurement method is the most widely investigated however, it is unsuitable for microfluidic systems because of a complicated fabrication process and difficult integration. Moreover, it is generally damaged by large deflection. This paper proposes a thin-film-based pressure sensor that is free from these limitations, using a liquid metal called galinstan. The proposed pressure sensor is easily integrated into a microfluidic system using soft lithography because galinstan exists in a liquid phase at room temperature. We investigated the characteristics of the proposed pressure sensor by calibrating for a pressure range from 0 to 230 kPa (R2 > 0.98) using deionized water. Furthermore, the viscosity of various fluid samples was measured for a shear-rate range of 30–1000 s−1. The results of Newtonian and non-Newtonian fluids were evaluated using a commercial viscometer and normalized difference was found to be less than 5.1% and 7.0%, respectively. The galinstan-based pressure sensor can be used in various microfluidic systems for long-term monitoring with high linearity, repeatability, and long-term stability. |
| Databáze: | OpenAIRE |
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