Defects limitation in epitaxial GaP on bistepped Si surface using UHVCVD-MBE growth cluster

Autor: Samy Almosni, Charles Cornet, S. Loualiche, O. Dehaese, Jithesh Kuyyalil, N. Chevalier, Antoine Létoublon, T. Nguyen Thanh, Nathalie Boudet, Nicolas Bertru, Jean-François Berar, Olivier Durand, Tony Rohel, Thomas Quinci, A. Le Corre, K. Tavernier, Jacky Even, Y. Ping Wang
Přispěvatelé: Fonctions Optiques pour les Technologies de l'informatiON (FOTON), Université de Rennes (UR)-Université européenne de Bretagne - European University of Brittany (UEB)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Télécom Bretagne-Centre National de la Recherche Scientifique (CNRS), CRG & Grands instruments (NEEL - CRG), Institut Néel (NEEL), Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Université européenne de Bretagne - European University of Brittany (UEB)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-Télécom Bretagne, CRG et Grands Instruments (CRG), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Joseph Fourier - Grenoble 1 (UJF)
Jazyk: angličtina
Rok vydání: 2013
Předmět:
Zdroj: Journal of Crystal Growth
Journal of Crystal Growth, 2013, 380, pp.157-162. ⟨10.1016/j.jcrysgro.2013.05.022⟩
Journal of Crystal Growth, Elsevier, 2013, 380, pp.157-162. ⟨10.1016/j.jcrysgro.2013.05.022⟩
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2013.05.022⟩
Popis: International audience; We report on the association of Ultra High Vaccum Chemical Vapor Deposition (UHVCVD) and Molecular Beam Epitaxy (MBE) to achieve III-V (GaP) integration on Si/Si(100) substrates. We first demonstrate that a very good flatness (0.3 nm) can be obtained when growing directly GaP on a chemically prepared Si substrate. X-ray diffraction pole figure however demonstrates that a residual amount of micro-twins originating from the hetero-interface still remains. Silicon homoepitaxial buffer layer is then optimized in the UHVCVD chamber on different Si substrates misorientation (+/-0.15-6°-off) . A flat, clean and bistepped Si surface is achieved during the homoepitaxial growth on 6°-off silicon substrates. Samples are then transferred under UHV conditions to the MBE chamber to perform GaP overgrowth. Keeping the same III-V overgrowth conditions, influence of silicon homoepitaxial buffer layer on micro-twins generation is determined quantitatively using Synchrotron X-Ray Diffraction. We finally demonstrate that growing a flat, clean and bistepped silicon buffer layer on a 6°-off substrate, and transferring it under UHV to the MBE chamber for GaP overgrowth reduces significantly the amount of anisotropic defects generated in the GaP epilayers.
Databáze: OpenAIRE
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