Self-aligned grating couplers on template-stripped metal pyramids via nanostencil lithography
Autor: | Daniel A. Mohr, Daniel J. Klemme, Timothy W. Johnson, Sang Hyun Oh |
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Rok vydání: | 2016 |
Předmět: |
Materials science
Fabrication Physics and Astronomy (miscellaneous) business.industry Nanoscale Science and Technology Physics::Optics 02 engineering and technology Grating 021001 nanoscience & nanotechnology 01 natural sciences Ray Optics Optical tweezers 0103 physical sciences Optoelectronics Stencil lithography 010306 general physics 0210 nano-technology business Lithography Diffraction grating Plasmon |
Zdroj: | Applied Physics Letters. 108:213106 |
ISSN: | 1077-3118 0003-6951 |
DOI: | 10.1063/1.4951673 |
Popis: | We combine nanostencil lithography and template stripping to create self-aligned patterns about the apex of ultrasmooth metal pyramids with high throughput. Three-dimensional patterns such as spiral and asymmetric linear gratings, which can couple incident light into a hot spot at the tip, are presented as examples of this fabrication method. Computer simulations demonstrate that spiral and linear diffraction grating patterns are both effective at coupling light to the tip. The self-aligned stencil lithography technique can be useful for integrating plasmonic couplers with sharp metallic tips for applications such as near-field optical spectroscopy, tip-based optical trapping, plasmonic sensing, and heat-assisted magnetic recording. |
Databáze: | OpenAIRE |
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