| Autor: |
Alexander Kolesnikov, Yury Kryukov, Marat Gafurov, Viktor Bodnarchuk |
| Rok vydání: |
2022 |
| Předmět: |
|
| Zdroj: |
Coatings; Volume 12; Issue 12; Pages: 1807 |
| ISSN: |
2079-6412 |
| Popis: |
Based on the analysis of the correlation between plasma glow and the magnetic field over a magnetron target, a model for predicting the shape of the target erosion of MSS is proposed. The magnetic field distribution is obtained upon direct measurement or calculation using the ELCUT software, which allows one to calculate the magnetic field based on the magnetron model. A special software has been developed for the calculation of the depletion profile of a target in a planar MSS. It allows one to predict the target erosion during the design phase of MSS, thus reducing the efforts required for designing a multi-magnet system of magnetron. The software has to be tested by comparing the calculated profile of the target erosion with the real one for different types of MSS. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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