Packaging process induced retention degradation of 256 Mbit DRAM with negative wordline bias

Autor: Pei-Ing Lee, Jengping Lin, Minchen Chang, S.N. Shih, Ruey-Dar Chang, Chao-Sung Lai
Rok vydání: 2004
Předmět:
Zdroj: Proceedings of the 11th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2004 (IEEE Cat. No.04TH8743).
Popis: The data retention time performance of 256 Mbit DRAM is degraded even in a 250/spl deg/C packaging process. The retention time degradation is strongly dependent on the negative wordline voltage and operation temperature. Trap-assisted gate induced drain leakage is proposed as the mechanism for the retention degradation based on electrical testing and simulation. It is believed that silicon-hydrogen bond breaking and moving at the gate and drain overlap region of an array transistor is the root cause of retention degradation.
Databáze: OpenAIRE