Quantitative Evaluation of Subsurface Damage by Improved Total Internal Reflection Microscopy

Autor: Huang Ming, Jian Chen, Baoming Huang, Jianda Shao, Zhouling Wu, Xin Cheng, Shijie Liu, Kaizao Ni
Rok vydání: 2019
Předmět:
0209 industrial biotechnology
Microscope
Materials science
Total internal reflection microscopy
02 engineering and technology
lcsh:Technology
01 natural sciences
law.invention
lcsh:Chemistry
010309 optics
020901 industrial engineering & automation
Optics
Wavelet
law
total internal reflection microscopy
0103 physical sciences
Digital image processing
General Materials Science
Depth of field
lcsh:QH301-705.5
Instrumentation
Fluid Flow and Transfer Processes
lcsh:T
business.industry
subsurface damage
Process Chemistry and Technology
definition curve
General Engineering
Laser
lcsh:QC1-999
Computer Science Applications
Grinding
Transformation (function)
lcsh:Biology (General)
lcsh:QD1-999
lcsh:TA1-2040
micro-focusing control
lcsh:Engineering (General). Civil engineering (General)
business
lcsh:Physics
Zdroj: Applied Sciences
Volume 9
Issue 9
Applied Sciences, Vol 9, Iss 9, p 1819 (2019)
ISSN: 2076-3417
DOI: 10.3390/app9091819
Popis: Subsurface damage (SSD), having a great impact on the laser-induced damage threshold (LIDT) of ultra-smooth optics applied in high-power laser systems, should be tightly controlled. An improved total internal reflection microscopy (TIRM), combined with digital image processing techniques, is proposed to quantitatively inspect SSD. With the characteristic that there is a relatively small depth of field (DOF) for a microscope at high magnification (50×
), a series of SSD images are captured along with the microscope focusing at different depths under the surface by means of micro-focusing control. The definition of each image is calculated through wavelet transformation. By simulation, the relationship between the definition of TIRM images and the depth of the SSD has been established. According to the definition curve, the SSD depth is acquired. Fused silica glasses polished after fine grinding are measured non-destructively by our TIRM setup. The results show that the improved TIRM is a useful method to evaluate SSD. It is helpful to improve the efficiency of optical fabrication.
Databáze: OpenAIRE
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