Time Resolved Spectroscopy of RF Plasmas : A Comparison of Hydrogen and Deuterium Plasmas
| Autor: | William Graham, C. M. O. Mahony |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 1997 |
| Předmět: |
010302 applied physics
Electron density Chemistry General Physics and Astronomy Plasma Electron Collisionality 01 natural sciences 010305 fluids & plasmas Ion Deuterium Physics::Plasma Physics [PHYS.HIST]Physics [physics]/Physics archives 0103 physical sciences Physics::Space Physics Plasma diagnostics Emission spectrum Atomic physics |
| Zdroj: | Journal de Physique IV Proceedings Journal de Physique IV Proceedings, EDP Sciences, 1997, 07 (C4), pp.C4-209-C4-214. ⟨10.1051/jp4:1997416⟩ Scopus-Elsevier |
| ISSN: | 1155-4339 1764-7177 |
| DOI: | 10.1051/jp4:1997416⟩ |
| Popis: | Spatio-temporal resolved emission is a powerful technique for exploring the neutral, ionic and electron characteristics of rf driven plasmas. Here this is illustrated by measurements of emission from capacitively coupled H 2 and D 2 rf driven plasmas. These exhibit two pronounced emission regions, one associated with the normal sheath edge and the other near the driven electrode. Time-resolved electrode and plasma potential measurements show this near-electrode emission is associated with field reversal in the electrode sheath. The close similarity of the emission structure in the two isotopes, and the general lack of such structure in He plasmas indicates that the structure and hence field reversal are not solely due to ion mass effects but may also involve the details of the electron collisionality of the gas. |
| Databáze: | OpenAIRE |
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